Inventor
HATAB ZIAD R
US6 patents
Patents
6 patentsUS6658144B1Dec 2, 2003
Diffraction tomography for monitoring latent image formation
MICRON TECHNOLOGY INC18 citations81
US6417076B1Jul 9, 2002
Automated combi deposition apparatus and method
MICRON TECHNOLOGY INC10 citations72
US6545369B1Apr 8, 2003
Overlay error reduction by minimization of unpatterned wafer area
MICRON TECHNOLOGY INC7 citations70
US6768213B2Jul 27, 2004
Automated combi deposition apparatus and method
MICRON TECHNOLOGY INC3 citations61
US6645703B2Nov 11, 2003
Methods of photo-processing photoresist
MICRON TECHNOLOGY INC2 citations58
US6482552B2Nov 19, 2002
Reticle forming methods
MICRON TECHNOLOGY INC3 citations58