Inventor
KLEIN MARTIN P
US4 patents
⚠️ This page may combine multiple inventors who share the name “KLEIN MARTIN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEXX SYSTEMS PACKAGING LLC
3 patentsUS6682288B2Jan 27, 2004
Substrate processing pallet and related substrate processing method and machine
NEXX SYSTEMS PACKAGING LLC18 citations82
US6530733B2Mar 11, 2003
Substrate processing pallet and related substrate processing method and machine
NEXX SYSTEMS PACKAGING LLC17 citations82
US6821912B2Nov 23, 2004
Substrate processing pallet and related substrate processing method and machine
NEXX SYSTEMS PACKAGING LLC9 citations71