Inventor
GOLOVATO STEPHEN N
US5 patents
⚠️ This page may combine multiple inventors who share the name “GOLOVATO STEPHEN N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6173673B1Jan 16, 2001
Method and apparatus for insulating a high power RF electrode through which plasma discharge gases are injected into a processing chamber
TOKYO ELECTRON LTD97 citations93
US6779481B2Aug 24, 2004
Electrical coupling between chamber parts in electronic device processing equipment
TOKYO ELECTRON LTD50 citations88
US6695318B2Feb 24, 2004
Electronic device processing equipment having contact gasket between chamber parts
TOKYO ELECTRON LTD3 citations60