Inventor

MEEHAN MICHAEL F

US4 patents

⚠️ This page may combine multiple inventors who share the name “MEEHAN MICHAEL F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

1 patent

US6760167B2Jul 6, 2004

Apparatus, system, and method for precision positioning and alignment of a lens in an optical system

ASML HOLDING NV42 citations93

ASML US INC

1 patent

US6411426B1Jun 25, 2002

Apparatus, system, and method for active compensation of aberrations in an optical system

ASML US INC58 citations93

(unassigned)

1 patent

US6556364B2Apr 29, 2003

Apparatus, system, and method for precision positioning and alignment of a lens in an optical system

46 citations92

MEEHAN MICHAEL F

1 patent

US8446562B2May 21, 2013

Actuator system using multiple piezoelectric actuators

MEEHAN MICHAEL F0 citations22