Inventor
TOMIDA HIROAKI
JP3 patents
Patents
3 patentsUS7771911B2Aug 10, 2010
Process for producing photoresist composition, filter, coater and photoresist composition
TOKYO OHKA KOGYO CO LTD7 citations69
US7276575B2Oct 2, 2007
Process for refining crude resin for resist
TOKYO OHKA KOGYO CO LTD1 citations49
US7312015B2Dec 25, 2007
Process for refining crude resin for electronic material
TOKYO OHKA KOGYO CO LTD1 citations48