Inventor

BOSSELMANN PHILIPP

DE3 patents

⚠️ This page may combine multiple inventors who share the name “BOSSELMANN PHILIPP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7473907B2Jan 6, 2009

Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination

ZEISS CARL SMT AG26 citations90

US7875865B2Jan 25, 2011

EUV illumination system with a system for measuring fluctuations of the light source

ZEISS CARL SMT AG9 citations82

SCHOLZ AXEL

1 patent

US8513628B2Aug 20, 2013

EUV illumination system with a system for measuring fluctuations of the light source

SCHOLZ AXEL2 citations59