Inventor
GLENN DANIEL E
US4 patents
⚠️ This page may combine multiple inventors who share the name “GLENN DANIEL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXTRON CORP
2 patentsUS6010538AJan 4, 2000
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
LUXTRON CORP216 citations95
US5362969ANov 8, 1994
Processing endpoint detecting technique and detector structure using multiple radiation sources or discrete detectors
LUXTRON CORP28 citations88