Inventor
KUBODERA MASATO
JP2 patents
Patents
2 patentsUS6759633B2Jul 6, 2004
Heat treating device
TOKYO ELECTRON LTD2 citations58
US9541920B2Jan 10, 2017
Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit
TOKYO ELECTRON LTD0 citations31