Inventor
SCHARPING ARMIN
DE2 patents
Patents
2 patentsUS8901684B2Dec 2, 2014
Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component
BENZEL HUBERT0 citations47
US8232126B2Jul 31, 2012
Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component
BENZEL HUBERT0 citations47