Inventor

SCHELLING CHRISTOPH

DE88 patents

⚠️ This page may combine multiple inventors who share the name “SCHELLING CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHELLING CHRISTOPH

BOSCH GMBH ROBERT

Sensor element with trenched cavity

Micromechanical structural element having a diaphragm and method for producing such a structural element

Sensor unit including a decoupling structure and manufacturing method therefor

Component having a micromechanical microphone structure

Micromechanical sensor element

Micromechanical device having two sensor patterns

Micromechanical sensor

MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection

Micromechanical component and corresponding method for its manufacture

Method for manufacturing a membrane sensor

Component having a micromechanical microphone pattern

Micromechanical component having a diaphragm structure

Sensor, method for producing a sensor and method for mounting a sensor

Microphone element and device for detecting acoustic and ultrasound signals

MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it

MEMS component including a sound-pressure-sensitive diaphragm element

MEMS optical switch with stop control

In-plane MEMS optical switch

MEMS optical switch with a cantilever coupler

Vertical microelectronic component and corresponding production method

Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement

Bonding pad for thermocompression bonding, process for producing a bonding pad and component

Method for producing a nanoscale channel structure

Micromechanical sensor that includes a stress decoupling structure

Micromechanical acceleration sensor having conductor tracks and cavities

Microelectronic component and corresponding production process

Micro heating plate device and sensor having a micro heating plate device

Component having a micromechanical microphone pattern

Method for manufacturing a micromechanical chip and a component having a chip of this type

Micromechanical semiconductor sensor

Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure

Micromechanical device and method for producing a micromechanical device

Electrical through-plating of semiconductor chips

Spectrometer device and method for producing a spectrometer device

Micromechanical sensor device with improved liquid tightness protection

Spectrometer device and method for producing a spectrometer device

Micromechanical sensor

MEMS component having low-resistance wiring and method for manufacturing it

Micromechanical component

ZOELLIN JOCHEN

Component having a micromechanical microphone structure

Component having a micromechanical microphone pattern

Component having a micromechanical microphone structure

SCHELLING CHRISTOPH

MEMS device having a microphone structure, and method for the production thereof

Capacitive MEMS element including a pressure-sensitive diaphragm

PRUEMM ANDREAS

Eutectic bonding of thin chips on a carrier substrate

PIRK TJALF

Micromechanical component having an inclined structure and corresponding manufacturing method

BENZEL HUBERT

Sensor and method for its production

LAMMEL GERHARD

Micromechanical capacitive pressure transducer and production method

PARAGON AG

Microstructured chemical sensor

SCHLOSSER ROMAN

Method for producing a micromechanical component and mircomechanical component