P

Inventor

HILL GORDON

US21 patents
⚠️ This page may combine multiple inventors who share the name “HILL GORDON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MKS INSTR INC

19 patents
US10649471B2May 12, 2020

Method and apparatus for pulse gas delivery with isolation valves

MKS INSTR INC7 citations83
US7950294B2May 31, 2011

Preventive maintenance diagnostics for valve systems

MKS INSTR INC7 citations82
US9133960B2Sep 15, 2015

Fluid control valves

MKS INSTR INC7 citations78
US10337105B2Jul 2, 2019

Method and apparatus for valve deposition cleaning and prevention by plasma discharge

MKS INSTR INC5 citations72
US11367598B2Jun 21, 2022

Method and apparatus for deposition cleaning in a pumping line

MKS INSTR INC1 citations71
US11024489B2Jun 1, 2021

Method and apparatus for deposition cleaning in a pumping line

MKS INSTR INC4 citations71
US10535506B2Jan 14, 2020

Method and apparatus for deposition cleaning in a pumping line

MKS INSTR INC4 citations71
US8037896B2Oct 18, 2011

Pressure regulation in remote zones

MKS INSTR INC4 citations62
US11054058B2Jul 6, 2021

Actively cooled vacuum isolation valve

MKS INSTR INC3 citations61
US11480457B2Oct 25, 2022

Predictive diagnostics systems and methods using vacuum pressure control valves

MKS INSTR INC0 citations59
US10557736B2Feb 11, 2020

Predictive diagnostics systems and methods using vacuum pressure control valves

MKS INSTR INC1 citations59
US7643909B2Jan 5, 2010

Highly responsive master-slave valve positioning

MKS INSTR INC3 citations57
US7369920B2May 6, 2008

Pressure control system with optimized performance

MKS INSTR INC5 citations57
US11664197B2May 30, 2023

Method and apparatus for plasma generation

MKS INSTR INC1 citations56
US11745229B2Sep 5, 2023

Endpoint detection of deposition cleaning in a pumping line and a processing chamber

MKS INSTR INC0 citations51
US9945486B2Apr 17, 2018

Radial sealing butterfly valve

MKS INSTR INC0 citations51
US12159765B2Dec 3, 2024

Method and apparatus for plasma generation

MKS INSTR INC0 citations50
US11854839B2Dec 26, 2023

Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation

MKS INSTR INC0 citations50
US12207385B2Jan 21, 2025

Method and apparatus for plasma ignition in toroidal plasma sources

MKS INSTR INC0 citations49

SMITH DONALD K

1 patent

SHAJII ALI

1 patent