Inventor
HILL GORDON
US21 patents
⚠️ This page may combine multiple inventors who share the name “HILL GORDON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
19 patentsUS10649471B2May 12, 2020
Method and apparatus for pulse gas delivery with isolation valves
MKS INSTR INC7 citations83
US7950294B2May 31, 2011
Preventive maintenance diagnostics for valve systems
MKS INSTR INC7 citations82
US9133960B2Sep 15, 2015
Fluid control valves
MKS INSTR INC7 citations78
US10337105B2Jul 2, 2019
Method and apparatus for valve deposition cleaning and prevention by plasma discharge
MKS INSTR INC5 citations72
US11367598B2Jun 21, 2022
Method and apparatus for deposition cleaning in a pumping line
MKS INSTR INC1 citations71
US11024489B2Jun 1, 2021
Method and apparatus for deposition cleaning in a pumping line
MKS INSTR INC4 citations71
US10535506B2Jan 14, 2020
Method and apparatus for deposition cleaning in a pumping line
MKS INSTR INC4 citations71
US8037896B2Oct 18, 2011
Pressure regulation in remote zones
MKS INSTR INC4 citations62
US11054058B2Jul 6, 2021
Actively cooled vacuum isolation valve
MKS INSTR INC3 citations61
US11480457B2Oct 25, 2022
Predictive diagnostics systems and methods using vacuum pressure control valves
MKS INSTR INC0 citations59
US10557736B2Feb 11, 2020
Predictive diagnostics systems and methods using vacuum pressure control valves
MKS INSTR INC1 citations59
US7643909B2Jan 5, 2010
Highly responsive master-slave valve positioning
MKS INSTR INC3 citations57
US7369920B2May 6, 2008
Pressure control system with optimized performance
MKS INSTR INC5 citations57
US11664197B2May 30, 2023
Method and apparatus for plasma generation
MKS INSTR INC1 citations56
US11745229B2Sep 5, 2023
Endpoint detection of deposition cleaning in a pumping line and a processing chamber
MKS INSTR INC0 citations51
US9945486B2Apr 17, 2018
Radial sealing butterfly valve
MKS INSTR INC0 citations51
US12159765B2Dec 3, 2024
Method and apparatus for plasma generation
MKS INSTR INC0 citations50
US11854839B2Dec 26, 2023
Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation
MKS INSTR INC0 citations50
US12207385B2Jan 21, 2025
Method and apparatus for plasma ignition in toroidal plasma sources
MKS INSTR INC0 citations49