Inventor
DE WIT PAUL CORNÉ HENRI
NL10 patents
Patents
10 patentsUS10466599B2Nov 5, 2019
Lithographic apparatus
ASML NETHERLANDS BV4 citations83
US10976675B2Apr 13, 2021
Lithographic apparatus
ASML NETHERLANDS BV1 citations72
US10191396B2Jan 29, 2019
Lithographic apparatus, object positioning system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US9946172B2Apr 17, 2018
System for positioning an object in lithography
ASML NETHERLANDS BV2 citations71
US11914308B2Feb 27, 2024
Lithographic apparatus
ASML NETHERLANDS BV0 citations62
US11609503B2Mar 21, 2023
Lithographic apparatus
ASML NETHERLANDS BV0 citations62
US10571815B2Feb 25, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
US12147167B2Nov 19, 2024
Imprint apparatus with movable stages
ASML NETHERLANDS BV0 citations50
US10394140B2Aug 27, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US12140873B2Nov 12, 2024
Positioning device
ASML NETHERLANDS BV0 citations46