Inventor

SHOKI TSUTOMU

JP76 patents

⚠️ This page may combine multiple inventors who share the name “SHOKI TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHOKI TSUTOMU

HOYA CORP

Reflection type mask blank and reflection type mask and production methods for them

X-ray membrane for x-ray mask, x-ray mask blank, x-ray mask, manufacturing method thereof and method of polishing silicon carbide film

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device

Reflective mask blank, reflective mask, and method for manufacturing semiconductor device

Reflection type mask blank for EUV exposure and reflection type mask for EUV exposure as well as method of producing the mask

Substrate with multilayer film, reflection type mask blank for exposure, reflection type mask for exposure and production method thereof as well as production method of semiconductor device

X-ray mask blank, x-ray mask, and pattern transfer method

Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method

Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device

Mask blank glass substrate, multilayer reflective film coated substrate, mask blank, mask, and methods of manufacturing the same

Reflective mask blank, reflective mask and methods of producing the mask blank and the mask

X-ray mask blank, X-ray mask and method for manufacturing the same

Method of manufacturing x-ray mask blank and method of manufacturing x-ray membrane for x-ray mask

X-ray mask blank and method of manufacturing the same

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

Substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method

Reflective mask blank, method of manufacturing reflective mask and method of manufacturing semiconductor device

Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device

Reflective mask, reflective mask blank and method of manufacturing reflective mask

Method of manufacturing a reflection type mask blank and method of manufacturing a reflection type mask

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method

Reflective mask blank, method of manufacturing same, reflective mask and method of manufacturing semiconductor device

Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device

Reflective mask blank, reflective mask, and method for manufacturing semiconductor device

Reflective mask blank, reflective mask, and method for manufacturing reflective mask and semiconductor device

Reflective mask blank, reflective mask, and method for manufacturing reflective mask and semiconductor device

Substrate with conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method

Reflective mask blank, reflective mask, and method of manufacturing the same

Reflective mask blank for exposure, reflective mask for exposure, method of producing a semiconductor device, and substrate provided with multilayer reflective film

Method of producing a reflection mask blank, method of producing a reflection mask, and method of producing a semiconductor device

Method of producing a reflective mask and method of producing a semiconductor device

Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure

Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure

Reflective mask blank and reflective mask

Reflective structure, reflective mask blank, reflective mask and method of manufacturing semiconductor device

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device

Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device

Reflective mask blank, reflective mask, method of manufacturing same, and method of manufacturing semiconductor device

Method for manufacturing reflective mask blank, and method for manufacturing reflective mask

Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device

SHOKI TSUTOMU

Multilayer reflective film coated substrate for a reflective mask, reflective mask blank, and methods of manufacturing the same