Inventor
KENBO YUKIO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KENBO YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
10 patentsUS6753972B1Jun 22, 2004
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
HITACHI LTD87 citations98
US5329333AJul 12, 1994
Exposure apparatus and method
HITACHI LTD45 citations96
US6485891B1Nov 26, 2002
Exposure apparatus and method
HITACHI LTD21 citations92
US6016187AJan 18, 2000
Exposure apparatus and method
HITACHI LTD20 citations92
US5767949AJun 16, 1998
Exposure apparatus and method
HITACHI LTD20 citations92
US5526094AJun 11, 1996
Exposure apparatus and method
HITACHI LTD11 citations82
US6806970B2Oct 19, 2004
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
HITACHI LTD12 citations74
US4504045AMar 12, 1985
Wafer transforming device
HITACHI LTD16 citations74
US6335146B1Jan 1, 2002
Exposure apparatus and method
HITACHI LTD5 citations73
US6468817B2Oct 22, 2002
Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby
HITACHI LTD4 citations61
RENESAS TECH CORP
4 patentsUS7277155B2Oct 2, 2007
Exposure apparatus and method
RENESAS TECH CORP4 citations73
US7012671B2Mar 14, 2006
Exposure apparatus and method
RENESAS TECH CORP2 citations62
US7604925B2Oct 20, 2009
Exposure apparatus and method
RENESAS TECH CORP0 citations52
US7598020B2Oct 6, 2009
Exposure apparatus and method
RENESAS TECH CORP0 citations52