Inventor
BHATT SANJIV M
US7 patents
⚠️ This page may combine multiple inventors who share the name “BHATT SANJIV M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
5 patentsUS6428729B1Aug 6, 2002
Composite substrate carrier
ENTEGRIS INC75 citations95
US6871741B2Mar 29, 2005
Composite substrate carrier
ENTEGRIS INC18 citations91
US7168564B2Jan 30, 2007
Composite substrate carrier
ENTEGRIS INC6 citations72
US6808668B2Oct 26, 2004
Process for fabricating composite substrate carrier
ENTEGRIS INC11 citations72
US8734698B2May 27, 2014
Composite substrate carrier
ENTEGRIS INC2 citations61