Inventor
NAKAI AKIYA
JP9 patents
Patents
9 patentsUS6333786B1Dec 25, 2001
Aligning method
CANON KK60 citations96
US5543921AAug 6, 1996
Aligning method utilizing reliability weighting coefficients
CANON KK96 citations96
US6253248B1Jun 26, 2001
Information processing apparatus and method
CANON KK94 citations94
US4918320AApr 17, 1990
Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment
CANON KK33 citations90
US6466968B2Oct 15, 2002
Information processing system capable of file transmission and information processing apparatus in the system
CANON KK35 citations89
US6097495AAug 1, 2000
Aligning method
CANON KK13 citations73
US5563708AOct 8, 1996
Semiconductor device manufacturing method wherein the substrate is interferically aligned by measuring the rotation of the original
CANON KK16 citations72
US4881100ANov 14, 1989
Alignment method
CANON KK7 citations72
US4811059AMar 7, 1989
Alignment method
CANON KK12 citations72