Inventor
VASSALLI OMAR
IT3 patents
Patents
3 patentsUS6638833B1Oct 28, 2003
Process for the fabrication of integrated devices with reduction of damage from plasma
ST MICROELECTRONICS SRL12 citations70
US6495455B2Dec 17, 2002
Method for enhancing selectivity between a film of a light-sensitive material and a layer to be etched in electronic semiconductor device fabrication processes
ST MICROELECTRONICS SRL7 citations70
US6313041B1Nov 6, 2001
Method of enhancing the rate of removal of a layer of light-sensitive material after an etching step in the fabrication of semiconductor electronic devices
ST MICROELECTRONICS SRL1 citations45