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Inventor
YAMAGATA HARUHIKO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGATA HARUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYO CORP
1 patent
US6899979B1
May 31, 2005
Photomask blank, photomask, methods of manufacturing the same, and method of forming micropattern
HOYO CORP
17 citations
86
HOYA CORP
1 patent
US7217481B2
May 15, 2007
Photomask blank, photomask, methods of manufacturing the same and methods of forming micropattern
HOYA CORP
2 citations
59