Inventor
KIMURA SHINSUKE
JP19 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA SHINSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MEMORY CORP
9 patentsUS9991111B2Jun 5, 2018
Apparatus and method of treating surface of semiconductor substrate
TOSHIBA MEMORY CORP2 citations73
US9859111B2Jan 2, 2018
Apparatus and method of treating surface of semiconductor substrate
TOSHIBA MEMORY CORP2 citations73
US10453729B2Oct 22, 2019
Substrate treatment apparatus and substrate treatment method
TOSHIBA MEMORY CORP1 citations62
US10978316B2Apr 13, 2021
Semiconductor processing device
TOSHIBA MEMORY CORP1 citations60
US10290491B2May 14, 2019
Substrate treatment apparatus and substrate treatment method
TOSHIBA MEMORY CORP0 citations51
US10032658B2Jul 24, 2018
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
TOSHIBA MEMORY CORP0 citations51
US9818627B2Nov 14, 2017
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
TOSHIBA MEMORY CORP0 citations51
US9748091B2Aug 29, 2017
Substrate treatment apparatus and substrate treatment method
TOSHIBA MEMORY CORP0 citations51
US10573508B2Feb 25, 2020
Surface treatment apparatus and method for semiconductor substrate
TOSHIBA MEMORY CORP0 citations41