Inventor
FURUNO KAZUO
KR3 patents
Patents
3 patentsUS8052795B2Nov 8, 2011
Catalyst enhanced chemical vapor deposition apparatus and deposition method using the same
SAMSUNG MOBILE DISPLAY CO LTD7 citations82
US7942968B2May 17, 2011
Catalyst enhanced chemical vapor deposition apparatus
SAMSUNG MOBILE DISPLAY CO LTD3 citations60
US7914621B2Mar 29, 2011
Vapor deposition source and vapor deposition apparatus having the same
SAMSUNG MOBILE DISPLAY CO LTD3 citations60