Inventor
COON DEREK
US23 patents
⚠️ This page may combine multiple inventors who share the name “COON DEREK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
11 patentsUS7339650B2Mar 4, 2008
Immersion lithography fluid control system that applies force to confine the immersion liquid
NIKON CORP46 citations96
US8743343B2Jun 3, 2014
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
NIKON CORP31 citations92
US7591561B2Sep 22, 2009
Liquid cooled mirror for use in extreme ultraviolet lithography
NIKON CORP22 citations92
US7576833B2Aug 18, 2009
Gas curtain type immersion lithography tool using porous material for fluid removal
NIKON CORP21 citations92
US7745079B2Jun 29, 2010
Apparatus for and method of thermophoretic protection of an object in a high-vacuum environment
NIKON CORP9 citations84
US7532309B2May 12, 2009
Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid
NIKON CORP15 citations84
US9329492B2May 3, 2016
Apparatus and method to control vacuum at porous material using multiple porous materials
NIKON CORP3 citations73
US9176394B2Nov 3, 2015
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
NIKON CORP3 citations62
US6847431B2Jan 25, 2005
Method and device for controlling fluid flow in an optical assembly
NIKON CORP3 citations62
US7903233B2Mar 8, 2011
Offset partial ring seal in immersion lithographic system
NIKON CORP1 citations52
US9217933B2Dec 22, 2015
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
NIKON CORP0 citations51
POON ALEX KA TIM
6 patentsUS8934080B2Jan 13, 2015
Apparatus and methods for recovering fluid in immersion lithography
POON ALEX KA TIM33 citations93
US8610873B2Dec 17, 2013
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
POON ALEX KA TIM26 citations92
US8289497B2Oct 16, 2012
Apparatus and methods for recovering fluid in immersion lithography
POON ALEX KA TIM35 citations92
US8068209B2Nov 29, 2011
Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool
POON ALEX KA TIM34 citations89
US8634055B2Jan 21, 2014
Apparatus and method to control vacuum at porous material using multiple porous materials
POON ALEX KA TIM2 citations62
US8477284B2Jul 2, 2013
Apparatus and method to control vacuum at porous material using multiple porous materials
POON ALEX KA TIM3 citations62
COON DEREK
4 patentsUS8497973B2Jul 30, 2013
Immersion lithography fluid control system regulating gas velocity based on contact angle
COON DEREK7 citations83
US8797500B2Aug 5, 2014
Immersion lithography fluid control system changing flow velocity of gas outlets based on motion of a surface
COON DEREK1 citations62
US8102501B2Jan 24, 2012
Immersion lithography fluid control system using an electric or magnetic field generator
COON DEREK2 citations62
US9618852B2Apr 11, 2017
Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outlets
COON DEREK0 citations51
POON ALEX
2 patentsUS8237911B2Aug 7, 2012
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
POON ALEX34 citations90
US8400610B2Mar 19, 2013
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
POON ALEX32 citations88