Inventor
IMAI AKIFUMI
JP4 patents
Patents
4 patentsUS11107685B2Aug 31, 2021
Semiconductor manufacturing method and semiconductor manufacturing device
MITSUBISHI ELECTRIC CORP4 citations70
US12142675B2Nov 12, 2024
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP2 citations68
US8987125B2Mar 24, 2015
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP1 citations49
US9893210B2Feb 13, 2018
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations48