Inventor
MACHT LUKASZ JERZY
NL11 patents
⚠️ This page may combine multiple inventors who share the name “MACHT LUKASZ JERZY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS10481506B2Nov 19, 2019
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US9488465B2Nov 8, 2016
Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus
ASML NETHERLANDS BV8 citations80
US9696638B2Jul 4, 2017
Lithographic apparatus
ASML NETHERLANDS BV3 citations72
US11181828B2Nov 23, 2021
Method of determining a value of a parameter of interest of a patterning process, device manufacturing method
ASML NETHERLANDS BV2 citations67
US11022892B2Jun 1, 2021
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations60
US10466594B2Nov 5, 2019
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations60
US9229340B2Jan 5, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
DEN BOEF ARIE JEFFREY
3 patentsUS8842293B2Sep 23, 2014
Level sensor arrangement for lithographic apparatus and device manufacturing method
DEN BOEF ARIE JEFFREY16 citations83
US8488107B2Jul 16, 2013
Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units
DEN BOEF ARIE JEFFREY0 citations41
US8675210B2Mar 18, 2014
Level sensor, lithographic apparatus, and substrate surface positioning method
DEN BOEF ARIE JEFFREY0 citations37