Inventor
HAYAKAWA YOSHINOBU
JP22 patents
⚠️ This page may combine multiple inventors who share the name “HAYAKAWA YOSHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS10115567B2Oct 30, 2018
Plasma processing apparatus
TOKYO ELECTRON LTD41 citations92
US10460950B2Oct 29, 2019
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD2 citations72
US8034213B2Oct 11, 2011
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD4 citations63
US12482663B2Nov 25, 2025
Processing apparatus
TOKYO ELECTRON LTD0 citations61
US9257301B2Feb 9, 2016
Method of etching silicon oxide film
TOKYO ELECTRON LTD0 citations52
US9793136B2Oct 17, 2017
Plasma etching method
TOKYO ELECTRON LTD0 citations37