Inventor
HANAOKA HIDETOSHI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “HANAOKA HIDETOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
17 patentsUS7951262B2May 31, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD486 citations99
US7988816B2Aug 2, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD63 citations97
US9490105B2Nov 8, 2016
Plasma processing apparatus and method
TOKYO ELECTRON LTD6 citations84
US10854431B2Dec 1, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10546727B2Jan 28, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10580622B2Mar 3, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US9966233B2May 8, 2018
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US11923171B2Mar 5, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations70
US8034213B2Oct 11, 2011
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD4 citations63
US11705308B2Jul 18, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations60
US11664198B2May 30, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations60
US11417500B2Aug 16, 2022
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations60
US11488807B2Nov 1, 2022
Plasma processing apparatus, processing method, and upper electrode structure
TOKYO ELECTRON LTD1 citations56
US10529539B2Jan 7, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD0 citations52
US9330891B2May 3, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US12586763B2Mar 24, 2026
Shower head electrode assembly and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39
US10847348B2Nov 24, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations37