Inventor
IWATA MANABU
JP29 patents
⚠️ This page may combine multiple inventors who share the name “IWATA MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
16 patentsUS7951262B2May 31, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD486 citations99
US8343306B2Jan 1, 2013
Plasma processing apparatus and method of plasma distribution correction
TOKYO ELECTRON LTD81 citations98
US7988816B2Aug 2, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD63 citations97
US7740737B2Jun 22, 2010
Plasma processing apparatus and method
TOKYO ELECTRON LTD25 citations92
US9490105B2Nov 8, 2016
Plasma processing apparatus and method
TOKYO ELECTRON LTD6 citations84
US10264662B2Apr 16, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD8 citations83
US7527016B2May 5, 2009
Plasma processing apparatus
TOKYO ELECTRON LTD16 citations82
US10854431B2Dec 1, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10546727B2Jan 28, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US8377255B2Feb 19, 2013
Plasma processing apparatus and method of controlling distribution of a plasma therein
TOKYO ELECTRON LTD2 citations63
US8034213B2Oct 11, 2011
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD4 citations63
US7829463B2Nov 9, 2010
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD4 citations63
US11908665B2Feb 20, 2024
Plasma processing apparatus and measurement method
TOKYO ELECTRON LTD0 citations52
US10529539B2Jan 7, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD0 citations52
US9484180B2Nov 1, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations42
US10141164B2Nov 27, 2018
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations39
IWATA MANABU
4 patentsUS9099503B2Aug 4, 2015
Plasma processing apparatus
IWATA MANABU7 citations83
US8431035B2Apr 30, 2013
Plasma processing apparatus and method
IWATA MANABU4 citations62
US8317969B2Nov 27, 2012
Plasma processing apparatus
IWATA MANABU4 citations61
US8440050B2May 14, 2013
Plasma processing apparatus and method, and storage medium
IWATA MANABU3 citations60