P
PatentIndex
Search
Landscape
Sign in
Inventor
GHANTASALA SATHYENDRA K
US
2 patents
Patents
2 patents
US10553397B2
Feb 4, 2020
Processing chamber hardware fault detection using spectral radio frequency analysis
APPLIED MATERIALS INC
0 citations
45
US10283320B2
May 7, 2019
Processing chamber hardware fault detection using spectral radio frequency analysis
APPLIED MATERIALS INC
0 citations
45