Inventor
JEANG EUN HEE
KR5 patents
⚠️ This page may combine multiple inventors who share the name “JEANG EUN HEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS11862457B2Jan 2, 2024
Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations59
US11581182B2Feb 14, 2023
Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations59
US10816480B2Oct 27, 2020
Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations57
US12585197B2Mar 24, 2026
Monitoring unit and substrate treating apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations53