Inventor
HIRAYAMA YUSUKE
JP18 patents
⚠️ This page may combine multiple inventors who share the name “HIRAYAMA YUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7628931B2Dec 8, 2009
Processing method for conservation of processing gases
TOKYO ELECTRON LTD7 citations73
US10290476B2May 14, 2019
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD3 citations71
US11705313B2Jul 18, 2023
Inspection method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations70
US7405162B2Jul 29, 2008
Etching method and computer-readable storage medium
TOKYO ELECTRON LTD3 citations62
US11183374B2Nov 23, 2021
Wastage determination method and plasma processing apparatus
TOKYO ELECTRON LTD1 citations60
US10068778B2Sep 4, 2018
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US10763089B2Sep 1, 2020
Wastage determination method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US7682978B2Mar 23, 2010
Plasma processing method and high-rate plasma etching apparatus
TOKYO ELECTRON LTD0 citations41
OHMI TADAHIRO
3 patentsHIRAYAMA YUSUKE
3 patentsUS8975188B2Mar 10, 2015
Plasma etching method
HIRAYAMA YUSUKE4 citations67
US8821683B2Sep 2, 2014
Substrate processing apparatus and method, and program and storage medium
HIRAYAMA YUSUKE1 citations50
US8558134B2Oct 15, 2013
Plasma processing apparatus and plasma processing method
HIRAYAMA YUSUKE0 citations38