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Inventor
MACK KENNETH D
US
2 patents
⚠️ This page may combine multiple inventors who share the name “MACK KENNETH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
1 patent
US5941758A
Aug 24, 1999
Method and apparatus for chemical-mechanical polishing
INTEL CORP
78 citations
89
IBM
1 patent
US5053104A
Oct 1, 1991
Method of plasma etching a substrate with a gaseous organohalide compound
IBM
6 citations
60