Inventor

LAGOS BRYAN C

US7 patents

⚠️ This page may combine multiple inventors who share the name “LAGOS BRYAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

5 patents

US6583428B1Jun 24, 2003

Apparatus for the backside gas cooling of a wafer in a batch ion implantation system

AXCELIS TECH INC28 citations88

US7352554B2Apr 1, 2008

Method for fabricating a Johnsen-Rahbek electrostatic wafer clamp

AXCELIS TECH INC9 citations82

US6552892B2Apr 22, 2003

Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp

AXCELIS TECH INC14 citations80

US6593699B2Jul 15, 2003

Method for molding a polymer surface that reduces particle generation and surface adhesion forces while maintaining a high heat transfer coefficient

AXCELIS TECH INC7 citations71

US6779263B2Aug 24, 2004

Method for molding a polymer surface that reduces particle generation and surface adhesion forces while maintaining a high heat transfer coefficient

AXCELIS TECH INC0 citations50

DURACELL INC

2 patents

US5607789AMar 4, 1997

Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same

DURACELL INC195 citations97

US5593794AJan 14, 1997

Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell

DURACELL INC40 citations91