P

Inventor

BARNS CHRISTOPHER E

US8 patents
⚠️ This page may combine multiple inventors who share the name “BARNS CHRISTOPHER E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTEL CORP

5 patents
US5635083AJun 3, 1997

Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate

INTEL CORP169 citations98
US5554064ASep 10, 1996

Orbital motion chemical-mechanical polishing apparatus and method of fabrication

INTEL CORP149 citations97
US5547417AAug 20, 1996

Method and apparatus for conditioning a semiconductor polishing pad

INTEL CORP152 citations97
US6095904AAug 1, 2000

Orbital motion chemical-mechanical polishing method and apparatus

INTEL CORP17 citations91
US6083089AJul 4, 2000

Method and apparatus for chemical mechanical polishing

INTEL CORP11 citations73

SPEEDFAM IPEC CORP

1 patent
US6106662AAug 22, 2000

Method and apparatus for endpoint detection for chemical mechanical polishing

SPEEDFAM IPEC CORP197 citations96

NASA

1 patent
US4271761AJun 9, 1981

High acceleration cable deployment system

NASA18 citations68

DWFRITZ AUTOMATION INC

1 patent
US9190796B2Nov 17, 2015

Apparatus for precision insertion

DWFRITZ AUTOMATION INC0 citations36