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Inventor
D SOUZA JOSEPH
US
2 patents
Patents
2 patents
US6633076B2
Oct 14, 2003
Methods and apparatus for producing stable low k FSG film for HDP-CVD
APPLIED MATERIALS INC
24 citations
90
US6511922B2
Jan 28, 2003
Methods and apparatus for producing stable low k FSG film for HDP-CVD
APPLIED MATERIALS INC
22 citations
90