Inventor
LUCARINI STEPHEN M
US5 patents
⚠️ This page may combine multiple inventors who share the name “LUCARINI STEPHEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS7397073B2Jul 8, 2008
Barrier dielectric stack for seam protection
IBM5 citations61
US6764551B2Jul 20, 2004
Process for removing dopant ions from a substrate
IBM5 citations59
US7101817B2Sep 5, 2006
System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing process
IBM0 citations48