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Inventor
HOGLUND ERIC W G
US
4 patents
⚠️ This page may combine multiple inventors who share the name “HOGLUND ERIC W G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT CORP
2 patents
US6136711A
Oct 24, 2000
Polishing composition including an inhibitor of tungsten etching
CABOT CORP
163 citations
98
US6083419A
Jul 4, 2000
Polishing composition including an inhibitor of tungsten etching
CABOT CORP
101 citations
97
CABOT MICROELECTRONICS CORP
2 patents
US6592776B1
Jul 15, 2003
Polishing composition for metal CMP
CABOT MICROELECTRONICS CORP
30 citations
92
US6767476B2
Jul 27, 2004
Polishing composition for metal CMP
CABOT MICROELECTRONICS CORP
9 citations
73