Inventor
KUNII YASUO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KUNII YASUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
6 patentsUS6503079B2Jan 7, 2003
Substrate processing apparatus and method for manufacturing semiconductor device
HITACHI INT ELECTRIC INC478 citations96
US7900580B2Mar 8, 2011
Substrate processing apparatus and reaction container
HITACHI INT ELECTRIC INC27 citations92
US8047158B2Nov 1, 2011
Substrate processing apparatus and reaction container
HITACHI INT ELECTRIC INC8 citations84
US6872636B2Mar 29, 2005
Method for fabricating a semiconductor device
HITACHI INT ELECTRIC INC13 citations83
US6949474B2Sep 27, 2005
Method of manufacturing a semiconductor device and a semiconductor manufacture system
HITACHI INT ELECTRIC INC3 citations62
US7851379B2Dec 14, 2010
Substrate processing method and substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations51