Inventor

VAN BUEL HENRICUS WILHELMUS MA

NL14 patents

Patents

14 patents

US6936385B2Aug 30, 2005

Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods

ASML NETHERLANDS BV37 citations91

US7251018B2Jul 31, 2007

Substrate table, method of measuring a position of a substrate and a lithographic apparatus

ASML NETHERLANDS BV16 citations83

US7094506B2Aug 22, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV15 citations83

US6618118B2Sep 9, 2003

Optical exposure method, device manufacturing method and lithographic projection apparatus

ASML NETHERLANDS BV18 citations82

US7420676B2Sep 2, 2008

Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus

ASML NETHERLANDS BV19 citations78

US7064807B2Jun 20, 2006

Lithographic apparatus

ASML NETHERLANDS BV10 citations74

US7113258B2Sep 26, 2006

Lithographic apparatus

ASML NETHERLANDS BV9 citations70

US6914664B2Jul 5, 2005

Lithographic apparatus, alignment method and device manufacturing method

ASML NETHERLANDS BV5 citations61

US7253884B2Aug 7, 2007

Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV5 citations59

US7349071B2Mar 25, 2008

Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method

ASML NETHERLANDS BV4 citations57

US7193231B2Mar 20, 2007

Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV1 citations51

US7041996B2May 9, 2006

Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby

ASML NETHERLANDS BV0 citations49

US7342642B2Mar 11, 2008

Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method

ASML NETHERLANDS BV0 citations45

US7239393B2Jul 3, 2007

Calibration method for a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations42