Inventor

PERSING HAROLD

US3 patents

⚠️ This page may combine multiple inventors who share the name “PERSING HAROLD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7132672B2Nov 7, 2006

Faraday dose and uniformity monitor for plasma based ion implantation

VARIAN SEMICONDUCTOR EQUIPMENT21 citations90

MAYNARD HELEN

1 patent

US8877654B2Nov 4, 2014

Pulsed plasma to affect conformal processing

MAYNARD HELEN0 citations43

PAPASOULIOTIS GEORGE

1 patent

US8728587B2May 20, 2014

Closed loop process control of plasma processed materials

PAPASOULIOTIS GEORGE0 citations38