Inventor

SCHEUER JAY

US6 patents

⚠️ This page may combine multiple inventors who share the name “SCHEUER JAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

4 patents

US7132672B2Nov 7, 2006

Faraday dose and uniformity monitor for plasma based ion implantation

VARIAN SEMICONDUCTOR EQUIPMENT21 citations90

US7999479B2Aug 16, 2011

Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control

VARIAN SEMICONDUCTOR EQUIPMENT6 citations60

US7521691B2Apr 21, 2009

Magnetic monitoring of a Faraday cup for an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT2 citations54

US9187832B2Nov 17, 2015

Extended lifetime ion source

VARIAN SEMICONDUCTOR EQUIPMENT1 citations49

BILOIU COSTEL

2 patents

US8590485B2Nov 26, 2013

Small form factor plasma source for high density wide ribbon ion beam generation

BILOIU COSTEL11 citations82

US8142607B2Mar 27, 2012

High density helicon plasma source for wide ribbon ion beam generation

BILOIU COSTEL7 citations80