Inventor
PEDERSEN BJORN O
US7 patents
⚠️ This page may combine multiple inventors who share the name “PEDERSEN BJORN O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
6 patentsUS6020592AFeb 1, 2000
Dose monitor for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT155 citations96
US7126808B2Oct 24, 2006
Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping
VARIAN SEMICONDUCTOR EQUIPMENT69 citations95
US7132672B2Nov 7, 2006
Faraday dose and uniformity monitor for plasma based ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT21 citations90
US7138768B2Nov 21, 2006
Indirectly heated cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT49 citations89
US6653642B2Nov 25, 2003
Methods and apparatus for operating high energy accelerator in low energy mode
VARIAN SEMICONDUCTOR EQUIPMENT36 citations89
US6762423B2Jul 13, 2004
Methods and apparatus for ion beam neutralization in magnets
VARIAN SEMICONDUCTOR EQUIPMENT18 citations82