Inventor
FUKUSHIMA NORIYASU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “FUKUSHIMA NORIYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
4 patentsUS7736824B2Jun 15, 2010
Photomask blank, photomask, and method of manufacture
SHINETSU CHEMICAL CO26 citations92
US7767368B2Aug 3, 2010
Method of fabricating photomask blank
SHINETSU CHEMICAL CO6 citations62
US7632609B2Dec 15, 2009
Fabrication method of photomask-blank
SHINETSU CHEMICAL CO0 citations52
US7344806B2Mar 18, 2008
Method of producing phase shift mask blank, method of producing phase shift mask, phase shift mask blank, and phase shift mask
SHINETSU CHEMICAL CO1 citations52