Inventor

PENG G GRANT

US3 patents

⚠️ This page may combine multiple inventors who share the name “PENG G GRANT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIH HONG

1 patent

US8679252B2Mar 25, 2014

Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof

SHIH HONG5 citations70

LAM RES CORP

1 patent

US8051863B2Nov 8, 2011

Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus

LAM RES CORP2 citations57

PENG G GRANT

1 patent

US8287656B2Oct 16, 2012

Methods for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus

PENG G GRANT1 citations41