Inventor

PADURARU CRISTIAN

US4 patents

⚠️ This page may combine multiple inventors who share the name “PADURARU CRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US8051863B2Nov 8, 2011

Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus

LAM RES CORP2 citations57

US7479457B2Jan 20, 2009

Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof

LAM RES CORP1 citations50

VALCORE JOHN

1 patent

US8293023B2Oct 23, 2012

System and method for monitoring wafer stress

VALCORE JOHN1 citations45

PENG G GRANT

1 patent

US8287656B2Oct 16, 2012

Methods for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus

PENG G GRANT1 citations41