Inventor

WANG ING-YANN

US2 patents

⚠️ This page may combine multiple inventors who share the name “WANG ING-YANN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US8425682B2Apr 23, 2013

High strip rate downstream chamber

LAM RES CORP378 citations97

WANG ING-YANN

1 patent

US8298336B2Oct 30, 2012

High strip rate downstream chamber

WANG ING-YANN384 citations95