Inventor

COOPERBERG DAVID J

US4 patents

⚠️ This page may combine multiple inventors who share the name “COOPERBERG DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US8425682B2Apr 23, 2013

High strip rate downstream chamber

LAM RES CORP378 citations97

US10403475B2Sep 3, 2019

Tunable multi-zone gas injection system

LAM RES CORP13 citations82

WANG ING-YANN

1 patent

US8298336B2Oct 30, 2012

High strip rate downstream chamber

WANG ING-YANN384 citations95

COOPERBERG DAVID J

1 patent

US9051647B2Jun 9, 2015

Tunable multi-zone gas injection system

COOPERBERG DAVID J36 citations90