Inventor
HEYS PETER NICHOLAS
GB6 patents
⚠️ This page may combine multiple inventors who share the name “HEYS PETER NICHOLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HEYS PETER NICHOLAS
4 patentsUS9802220B2Oct 31, 2017
Molybdenum (IV) amide precursors and use thereof in atomic layer deposition
HEYS PETER NICHOLAS22 citations88
US8568530B2Oct 29, 2013
Use of cyclopentadienyl type hafnium and zirconium precursors in atomic layer deposition
HEYS PETER NICHOLAS16 citations81
US8221852B2Jul 17, 2012
Methods of atomic layer deposition using titanium-based precursors
HEYS PETER NICHOLAS8 citations79
USRE45124ESep 9, 2014
Methods of atomic layer deposition using titanium-based precursors
HEYS PETER NICHOLAS0 citations47