Inventor
KOMORI KANA
JP2 patents
Patents
2 patentsUS10651029B2May 12, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations67
US10840083B2Nov 17, 2020
Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe
SCREEN HOLDINGS CO LTD0 citations34