Inventor

SHIOKAWA TOSHIYUKI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “SHIOKAWA TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US11309194B2Apr 19, 2022

Substrate liquid treatment apparatus

TOKYO ELECTRON LTD3 citations71

US10483137B2Nov 19, 2019

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium

TOKYO ELECTRON LTD3 citations70

US11802848B2Oct 31, 2023

pH measuring device and pH measuring method

TOKYO ELECTRON LTD0 citations57

US11424141B2Aug 23, 2022

Substrate processing apparatus, substrate processing method and recording medium

TOKYO ELECTRON LTD0 citations49

US9887092B2Feb 6, 2018

Etching method, etching apparatus, and storage medium

TOKYO ELECTRON LTD0 citations36

TANAKA HIROSHI

1 patent

US9070549B2Jun 30, 2015

Substrate processing apparatus and substrate processing method

TANAKA HIROSHI5 citations71