P

Inventor

ONOUE TAKAHIRO

SG30 patents
⚠️ This page may combine multiple inventors who share the name “ONOUE TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOYA CORP

14 patents
US10481484B2Nov 19, 2019

Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device

HOYA CORP12 citations84
US9864267B2Jan 9, 2018

Reflective mask blank, reflective mask, and method for manufacturing semiconductor device

HOYA CORP8 citations84
US11480867B2Oct 25, 2022

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

HOYA CORP4 citations72
US11003068B2May 11, 2021

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

HOYA CORP2 citations72
US9740091B2Aug 22, 2017

Substrate with multilayer reflective film, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method of manufacturing the same, and method of manufacturing a semiconductor device

HOYA CORP4 citations72
US9383637B2Jul 5, 2016

Substrate with multilayer reflective film, reflective mask blank for EUV lithography, method of manufacturing reflective mask for EUV lithography and method of manufacturing semiconductor device

HOYA CORP3 citations72
US12591173B2Mar 31, 2026

Substrate with multilayer reflective film, reflective mask blank, reflective mask, and method for manufacturing semiconductor device

HOYA CORP0 citations62
US12135496B2Nov 5, 2024

Reflective mask blank and reflective mask

HOYA CORP0 citations62
US11880130B2Jan 23, 2024

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

HOYA CORP0 citations62
US11852964B2Dec 26, 2023

Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device

HOYA CORP0 citations62
US11454878B2Sep 27, 2022

Substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device

HOYA CORP0 citations62
US11048159B2Jun 29, 2021

Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device

HOYA CORP0 citations62
US11237472B2Feb 1, 2022

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

HOYA CORP0 citations58
US9720317B2Aug 1, 2017

Substrate with a multilayer reflective film, reflective mask blank for EUV lithography, reflective mask for EUV lithography and method of manufacturing the same, and method of manufacturing a semiconductor device

HOYA CORP0 citations52

ONOUE TAKAHIRO

8 patents

TACHIBANA TOSHIAKI

2 patents

WD MEDIA SINGAPORE PTE LTD

2 patents

UMEZAWA TEIICHIRO

1 patent

SONOBE YOSHIAKI

1 patent

SATO TOKICHIRO

1 patent

SAKAMOTO KAZUAKI

1 patent