Inventor
SUN YUYANG
US7 patents
⚠️ This page may combine multiple inventors who share the name “SUN YUYANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
6 patentsUS8921016B1Dec 30, 2014
Methods involving color-aware retargeting of individual decomposed patterns when designing masks to be used in multiple patterning processes
GLOBALFOUNDRIES INC5 citations68
US8869075B2Oct 21, 2014
Locally optimized coloring for cleaning lithographic hotspots
GLOBALFOUNDRIES INC5 citations68
US9064086B2Jun 23, 2015
Retargeting semiconductor device shapes for multiple patterning processes
GLOBALFOUNDRIES INC0 citations49
US8910094B2Dec 9, 2014
Retargeting semiconductor device shapes for multiple patterning processes
GLOBALFOUNDRIES INC1 citations49
US8993224B2Mar 31, 2015
Multiple patterning process for forming trenches or holes using stitched assist features
GLOBALFOUNDRIES INC1 citations48
US9171735B2Oct 27, 2015
Method for fabricating a semiconductor integrated circuit with a litho-etch, litho-etch process for etching trenches
GLOBALFOUNDRIES INC1 citations47